Atomic layer deposition for thin films

Fundamentals of Atomic Layer Deposition (ALD)

ALD Precursors and Chemistry

Thermal vs. Plasma-Enhanced ALD

ALD for High-κ Dielectric Films

ALD for Barrier and Encapsulation Layers

Spatial ALD and Roll-to-Roll Processing

ALD for Nanostructured and Porous Materials

In Situ Characterization of ALD Processes

ALD for Catalytic Nanomaterials

Challenges and Limitations of ALD

ALD for Ferroelectric and Multifunctional Films

Atomic Layer Etching (ALE) and Its Synergy with ALD